Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements

ABSTRACT

A spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry. One or more electrostatically deflectable elements are suspended by hinges from the upper substrate. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. Motion stops may be attached to the reflective deflectable elements so that the mirror does not snap to the bottom substrate. Instead, the motion stop rests against the upper substrate thus limiting the deflection angle of the reflective deflectable elements.

CROSS-REFERENCE TO RELATED CASES

This application is a continuation of U.S. patent application Ser. No.10/948,871 to Huibers filed Sep. 24, 2004, which is a continuation ofU.S. patent application Ser. No. 10/748,899 to Huibers filed Dec. 29,2003 which is a continuation of Ser. No. 10/153,138 to Huibers filed May20, 2002, which is a divisional application of U.S. patent applicationSer. No. 10/043,703 to Huibers filed on Jan. 9, 2002, (now U.S. Pat. No.6,538,800) which is a continuation of U.S. patent application Ser. No.09/624,591 to Huibers filed Jul. 24, 2000 (now U.S. Pat. No. 6,356,378),which is a continuation of U.S. patent application Ser. No. 09/437,586to Huibers filed Nov. 9, 1999 (now U.S. Pat. No. 6,172,797), which is acontinuation of U.S. patent application Ser. No. 09/160,361 to Huibersfiled Sep. 24, 1998 (now U.S. Pat. No. 6,046,840), which is acontinuation-in-part of U.S. patent application Ser. No. 08/665,380filed on Jun. 18, 1996 (now U.S. Pat. No. 5,835,256), which claimspriority from a U.S. provisional patent application Ser. No. 60/000,322filed on Jun. 19, 1995, the subject matter of each being incorporatedherein by reference.

TECHNICAL FIELD OF THE INVENTION

The present invention relates to spatial light modulators, and, moreparticularly, to spatial light modulators with electronicallyaddressable deflectable elements attached to an optically transmissivesubstrate.

BACKGROUND OF THE INVENTION

Spatial light modulators (SLMs) are transducers that modulate anincident beam of light in a spatial pattern that corresponds to anoptical or electrical input. The incident light beam may be modulated inphase, intensity, polarization, or direction. This modulation may beaccomplished through the use of a variety of materials exhibitingmagneto-optic, electro-optic, or elastic properties. SLMs have manyapplications, including display systems, optical information processing,optical data storage, and printing.

A common technology for an SLM cell is to use a liquid crystal materialsandwiched between two electrodes, at least one of the electrodes beingtransparent. By applying a voltage between the electrodes, theorientation of the molecules in the liquid crystal layer changes, whichalters the optical properties of the layer, in particular thepolarization of light traveling through the layer. Thus, the liquidcrystal layer in combination with one or more polarizing filters can beused to create an amplitude modulator (light valve). However, suchliquid crystal based devices have several disadvantages for SLMapplications. First, much of the light is absorbed in the polarizingfilters, reducing optical efficiency. In addition, the devices havelimited contrast ratio, (the ratio of the intensities of the pixel whenon and the pixel when off), and the response time of the most widelyused liquid crystals is very slow (several milliseconds). Liquidcrystals also have poor performance outside a fairly narrow temperaturerange. For these reasons and others, mechanical SLMs, which use movingstructures to deflect light, have been pursued.

An early mechanical SLM designed for use in a projection display systemis described by Nathanson, U.S. Pat. No. 3,746,911. The individualpixels of the SLM are addressed via a scanning electron beam as in aconventional direct-view cathode ray tube (CRT). Instead of exciting aphosphor, the electron beam charges deflectable reflective elementsarrayed on a quartz faceplate. Elements that are charged bend towardsthe faceplate due to electrostatic forces. Bent and unbent elementsreflect parallel incident light beams in different directions. Lightreflected from unbent elements is blocked with a set of Schlieren stops,while light from bent elements is allowed to pass through projectionoptics and form an image on a screen.

Another electron-beam-addressed SLM is the Eidophor, described in E.Baumann, “The Fischer large-screen projection system (Eidophor)” 20 J.SMPTE 351 (1953). In this system, the active optical element is an oilfilm, which is periodically dimpled by the electron beam so as todiffract incident light. A disadvantage of the Eidophor system is thatthe oil film is polymerized by constant electron bombardment and oilvapors result in a short cathode lifetime. A disadvantage of both ofthese systems is their use of bulky and expensive vacuum tubes.

A spatial light modulator in which movable elements are addressed viaelectrical circuitry on a silicon substrate is described in K. Peterson,“Micromechanical Light Modulator Array Fabricated on Silicon” 31 Appl.Phys. Let. 521 (1977). This SLM contains a 16 by 1 array of cantilevermirrors above a silicon substrate. The mirrors are made of silicondioxide and have a reflective metal coating. The space below the mirrorsis created by etching away silicon via a KOH etch. The mirrors aredeflected by electrostatic attraction: a voltage bias is applied betweenthe reflective elements and the substrate and generates an electrostaticforce. A similar spatial light modulator is the two-dimensional arraydescribed by Hartstein and Peterson, U.S. Pat. No. 4,229,732. Althoughthe switching voltage of this SLM is lowered by connecting thedeflectable mirror elements at only one corner, the device has lowefficiency due to the small optically active area (as a fraction of theentire device area). In addition, diffraction from the addressingcircuitry lowers the contrast ratio of the display.

A silicon-based micro-mechanical SLM in which a large fraction of thedevice is optically active is the Digital Mirror Device (DMD), developedby Texas Instruments and described by Hornbeck, U.S. Pat. No. 5,216,537and its references. The most recent implementations include a firstaluminum plate suspended via torsion hinges above addressing electrodes.A second aluminum plate is built on top of the first and acts as amirror. The double plate aluminum structure is required to provide anapproximately flat mirror surface that covers the underlying circuitryand hinge mechanism, which is essential in order to achieve anacceptable contrast ratio. The entire structure is made from aluminumalloys—the plates, torsion hinges and special “landing tips” each haveindependently optimized compositions. Aluminum can be deposited at lowtemperatures, avoiding damage to the underlying CMOS addressingcircuitry during manufacture. Aluminum has the disadvantage, however, ofbeing susceptible to fatigue and plastic deformation, which can lead tolong-term reliability problems and cell “memory”, where the restposition begins to tilt towards its most frequently occupied position.Additional disadvantages of the DMD include: 1) A large dimple (causedby the mirror support post) is present at the center of the mirror incurrent designs which causes scattering of the incident light andreduces optical efficiency. 2) The entire DMD structure is released viaplasma etching of a polymer sacrificial layer. This manufacturingprocess is problematic, in that it (a) requires large gaps betweenmirrors in order for the plasma etch release to be effective, and (b)pixel failures are created during the release process, which is notsufficiently gentle on the delicate micromirror structures. Due to thecomplex structure and process difficulties, commercialization of the DMDhas proceeded slowly.

Another SLM fabricated on a flat substrate is the Grating Light Valve(GLV) described by Bloom, et. al., U.S. Pat. No. 5,311,360. As describedin the '360 patent, the GLV's deflectable mechanical elements arereflective flat beams or ribbons. Light reflects from both the ribbonsand the substrate. If the distance between the surface of the reflectiveribbons and the reflective substrate is one-half of a wavelength, lightreflected from the two surfaces adds constructively and the device actslike a mirror. If this distance is one-quarter of a wavelength, lightdirectly reflected from the two surfaces will interfere destructivelyand the device will act as a diffraction grating, sending light intodiffracted orders. A favored approach is to make the device from ceramicfilms of high mechanical quality, such as LPCVD (low pressure chemicalvapor deposition) silicon nitride.

Even though addressing circuitry cannot be placed below such films, aninherent electromechanical bistability can be used to implement a“passive” addressing scheme (Raj Apte, Grating Light Valves for HighResolution Displays, Stanford University Ph.D. thesis, June 1994). Thebistability exists because the mechanical force required for deflectionis roughly linear, whereas the electrostatic force obeys an inversesquare law. As a voltage bias is applied, the ribbons deflect. When theribbons are deflected past a certain point, the restoring mechanicalforce can no longer balance the electrostatic force and the ribbons snapto the substrate. The voltage must be lowered substantially below thesnapping voltage in order for the ribbons to return to their undeflectedposition. This latching action allows driver circuitry to be placedoff-chip or only at the periphery, and addressing circuitry does notneed to occupy the optically active part of the array. In practice, thisapproach is difficult to implement: when the ribbon comes into contactwith the substrate, which is at a different potential, charge can beinjected into the insulating ceramic ribbon material, shifting theswitching voltages and making passive addressing impossible. Filmnon-uniformity across the device can also shift the switching voltagessignificantly. Another problem with the GLV technology is sticking:since the underside of the deflected ribbons contacts the substrate witha large surface area, the ribbons tend to stick to the substrate. Filmscomprising the structure can be roughened, but this results inundesirable optical scattering, reducing the contrast ratio of thedevice.

Micro-mechanical mirror-based SLMs have an advantage overdiffraction-based SLMs because they reflect incident light at only oneangle, which can be quite large. This simplifies the design of theoptical system in which the modulated light may pass through the centerof the imaging lens, while maintaining high efficiency. This results inan image with fewer aberrations and lowers manufacturing cost.

The need therefore is for a spatial light modulator with a high contrastratio, high efficiency, high speed, which is easy to fabricate, andwhose moving elements are made of reliable mechanical materials.

SUMMARY OF THE INVENTION

Briefly, in accordance with an embodiment of this invention, a spatiallight modulator comprises an optically transmissive substrate and acircuit substrate. One or more reflective deflectable elements areattached to the lower surface of the optically transmissive substrate.This optically transmissive substrate is held above, and spaced apartfrom, a circuit substrate containing addressing circuitry capable ofselective activation of each reflective deflectable element.

In operation, individual reflective elements are selectively deflectedand serve to spatially modulate light that is incident to, and thenreflected back through, the optically transmissive substrate.

In one embodiment of this invention, the spatial light modulatorcomprises an array of pixels. Each pixel comprises a single deflectablerigid mirror and a torsion hinge, which attaches the mirror to an upper,optically transmissive substrate. The optically transmissive substrateis held above a silicon substrate, on which is formed an array ofelectrodes. In one embodiment, an aperture layer is built into theoptically transmissive substrate to block light from reaching theelectrodes or the mirror support structure (hinges and attachments).Individual mirrors are selectively deflected electrostatically byapplying a voltage bias between individual mirrors and theircorresponding electrodes.

In accordance with an embodiment of this invention, a process forfabricating the spatial light modulator is provided. A sacrificial layeris deposited on a substrate. A hole is etched through the sacrificiallayer, the hole allowing for attachment of subsequent layers to theoptically transmissive substrate. A reflective layer is deposited on thesacrificial layer, and is patterned to define one or more reflectivedeflectable elements. The reflective layer is connected to thesacrificial layer through the hole. The sacrificial layer is removed sothat the reflective elements are free and may deflect. Addressingcircuitry and electrodes are formed on a circuit substrate. Thesubstrate and circuit substrate are aligned and joined such that thereflective elements may be selectively actuated by the addressingcircuitry and electrodes. The two substrates may be joined, for example,by epoxy around the periphery of the substrates.

In accordance with an embodiment of this invention, a process includesasserting a bias voltage between the reflective deflectable element andthe addressing circuitry. The bias voltage may be changed during deviceoperation.

The electrical addressing circuitry on the silicon substrate may befabricated using standard CMOS technology, and resembles a low-densitymemory array.

In accordance with another embodiment of the invention, a spatial lightmodulator is disclosed. The spatial light modulator comprises: asubstrate that is transmissive to visible light; a silicon substrate;wherein the silicon substrate and the substrate that is transmissive tovisible light are bonded together with a spacer therebetween forming agap between the substrates; and a plurality of deflectable elementsencapsulated within the gap.

In yet another embodiment of the invention, a spatial light modulator isdisclosed. The spatial light modulator comprises: a first substratehaving a plurality of micromirrors and a spacer that is positionedwithin the plurality of micromirrors; and a second substrate having anarray of electrodes and circuitry, wherein the first and secondsubstrates are bonded together with the spacer between the first andsecond substrates.

In yet another embodiment of the invention, a spatial light modulator isdisclosed, which comprises: first substrate; a second substrate, whereinthe first and the second substrates are bonded together with a spacertherebetween so as to form a gap between the substrates; and a pluralityof micromirrors positioned within the gap, each micromirror furthercomprising: a mirror plate, further comprising: a first and secondportions, wherein the second portion moves away from the first substratewhen the first portion moves towards the first substrate; a hinge thatis located in a plane other than a plane in which the mirror plate islocated; and wherein the mirror plate is attached to the hinge such thatthe mirror plate is operable to rotate.

In yet another embodiment of the invention, a method of modulating lightis provided, which comprises: providing a spatial light modulator thatcomprises a first and second substrates, the first substrate beingoptically transmissive and being held above the second substrate, anelectrostatically deflectable mirror suspended by a hinge from theoptically transmissive substrate, the second substrate containing anelectrode and circuitry; providing an incoming light beam that passesthrough the optically transmissive substrate and that is reflected bythe electrostatically deflectable mirror; applying a voltage biasbetween the mirror and the electrode so as to deflect the mirror due toelectrostatic attraction; and deflecting the light beam back through theoptically transmissive substrate.

In yet another embodiment of the invention, a method of making a spatiallight modulator is provided, which comprises: forming a plurality ofmicromirrors on a first substrate; forming a plurality of circuitry andelectrodes on a second substrate; and joining the first and secondsubstrates together with a spacer therebetween by bonding with anadhesive.

In yet another embodiment of the invention, a method of modulating lightis disclosed. The method comprises: providing a spatial light modulatorthat comprises: a substrate that is transmissive to visible light; asilicon substrate having a plurality of electrodes and circuitry;wherein the silicon substrate and the substrate that is transmissive tovisible light are bonded together with a spacer therebetween forming agap between the substrates; and a plurality of deflectable elementsencapsulated within the gap; providing an incoming light beam thatpasses through the light transmissive substrate and that is reflected bythe electrostatically deflectable elements; applying a voltage biasbetween the deformable element and the electrode so as to deflect thedeflectable element due to electrostatic attraction; and deflecting thelight beam back through the optically transmissive substrate.

Since the two substrates are joined together only after they areindividually fabricated, the fabrication processes for each substrateare decoupled. As there is no concern for CMOS compatibility during themanufacturing of the top substrate, an advantage of the spatial lightmodulator of this invention is that the mechanically deflectablereflective elements can be made from materials chosen only for theirexcellent mechanical properties, such as LPCVD-deposited siliconnitride, silicon oxide, amorphous silicon and poly-silicon. Since thesefilms are deposited at high temperatures, they are not normallycompatible with CMOS processes, because the latter use aluminuminterconnects which would melt at these higher temperatures.

A further advantage of this spatial light modulator is that after thetwo substrates are bonded together, the moving parts may be fullyencapsulated. This provides an excellent method of packaging and leadsto high device robustness.

The spatial light modulator of this invention has the further advantagethat it is inexpensive and straightforward to construct. It is composedof two substrates: one which may be made using standard CMOS techniques,and a second optically transmissive substrate containing the deflectablereflective elements, which is very simple to fabricate.

Yet another advantage of this spatial light modulator is that a lightblocking aperture layer, as well as other planar optics (e.g. colorfilters, reflectivity enhancement coatings, micro-lenses) can beincorporated into the optically transmissive substrate. This can improvethe contrast ratio and increase the effective light deflection angle,and reduce the cost of free-space optics at the systems level.

Yet another advantage of this spatial light modulator is that the motionlimiting structures can also be made of high-temperature materials whichare hard and have long lifetimes. Because of their hardness andgeometry, the motion limiting structures have a small contact areaduring operation, which greatly reduces sticking forces between thestructures and the substrate. Also, the motion limiting structures areat the same electrical potential as the substrate with which they comeinto contact which prevents sticking via welding and charge injection.These were problems encountered with early versions of the DMD and theGLV.

Yet another advantage of this spatial light modulator is that thehigh-temperature processing of the optically transmissive substrateallows for the deposition of dielectric films with alternating high-lowindices of refraction onto the deflectable reflective elements, whichenhance their reflectivity.

These and other advantages will become apparent to those skilled in theart after consideration of the ensuing drawings and detaileddescription.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows a top perspective view of a corner of an embodiment of aspatial light modulator of the present invention;

FIGS. 2A-2F show a bottom perspective view of a pixel cell of FIG. 1during several stages of fabrication;

FIGS. 3A and 3B show a cross-section of a pixel cell of FIG. 1modulating a light beam;

FIG. 4 shows a graph of hysteresis in the deflection angle of the mirrorof FIG. 1 versus applied voltage bias;

FIG. 5 shows a graph of the electrical and mechanical torques acting ona deflectable mirror for several different bias voltages;

FIG. 6A shows a DRAM structure for individually addressing the SLM pixelcells of FIG. 1;

FIG. 6B shows an SRAM structure for individual addressing the SLM pixelcells of FIG. 1;

FIG. 7 shows a top view of a spacer placement in a dense pixel array;

FIGS. 8A-8H show bottom views of mirror arrays with different hingedesigns;

FIGS. 9A-9D show the fabrication process of a pixel cell having thehinge between the mirror and optically transmissive substrate (sub-hingedesign);

FIGS. 10A-10D show embodiments of the sub-hinge design;

FIGS. 11A-11C show the fabrication process of a pixel cell having themirror between the hinge and optically transmissive substrate(super-hinge design);

FIG. 12 shows an embodiment of the super-hinge design;

FIG. 13 shows an exploded top perspective view of a corner of anembodiment of a spatial light modulator of the present invention; and

FIG. 14 shows a cell having the sub-hinge design of FIG. 10A configuredin an array of similarly structured cells.

REFERENCE NUMERALS IN THE DRAWINGS

-   10 Micro-mechanical spatial light modulator (SLM)-   11 Pixel cells-   14 Lower surface-   15 Upper surface-   20 Optically transmissive substrate-   21 Aperture layer-   24 Protective layer-   25 Hole-   26 Sacrificial layer-   27 Mirror structural support layer-   30 Hinge layer-   31 Reflective layer-   34 Circuit substrate-   35 Addressing circuitry-   38 Passivation layer-   42 Bottom electrode-   43 Contact-   44 Spacer-   45 Passivation layer-   48 Mirror-   49 Motion stop-   50 Hinge-   51 Hinge support-   54 Attachment region-   55 Incoming light beam-   58 Outgoing light beam-   59 Word line-   62 Bit line-   63 Light source-   66 Imaging optics-   67 Transistor-   70 First dielectric layer-   71 Second dielectric layer-   74 Voltage source-   78 Optical dump-   111 Bumps

DETAILED DESCRIPTION OF THE INVENTION

This description refers to several figures which contain referencenumerals. The same reference numerals in different figures indicatesimilar or identical items.

Throughout this description, the words “optical” and “light” are used.In the description and claims, “optical” means related to anyelectromagnetic frequencies, not just frequencies in the visible range.For example, an “optically transmissive substrate” is a substrate whichis transmissive to electromagnetic propagation of a working frequency,whether in the visible range or not.

A top perspective view of a corner of an embodiment of amicro-mechanical spatial light modulator 10 (hereinafter, “SLM 10”) ofthis invention is shown in FIG. 1. An exploded view of the SLM 10 ofFIG. 1 is shown in FIG. 13. SLM 10 may include pixel cells of anyconfiguration or array size. However, for clarity, only four pixel cells12, 12 a, 12 b and 12 c in a two by two grid configuration are shown inFIG. 1. The pixel cells 12, 12 a, 12 b and 12 c have a pixel pitch of,for example, 12 microns. “Pixel pitch” is defined as the distancebetween like portions of neighboring pixel cells.

Reflective deflectable elements (e.g., mirrors 48, 48 a, 48 b and 48 c),each corresponding to a respective pixel cell 12, 12 a, 12 b and 12 c,are attached to the lower surface 14 of an optically transmissivesubstrate 20 in an undeflected position. Thus, mirrors 48, 48 a, 48 band 48 c are visible through optically transmissive substrate 20 inFIG. 1. For clarity, light blocking aperture layers 22, between themirrors 48, 48 a, 48 b or 48 c and the optically transmissive substrate20, are represented only by dashed lines so as to show underlying hinges50, 50 a, 50 b and 50 c. The distance separating neighboring mirrors maybe, for example, 0.5 microns or less.

One process for fabricating SLM 10 is illustrated in bottom perspectiveview in FIGS. 2A-2F. For clarity, only the fabrication of pixel cell 12is described. However, from this description, it will be apparent thatpixel cells 12 a, 12 b, 12 c and the other pixel cells in SLM 10 may befabricated at the same time and in the same manner as pixel cell 12 isfabricated.

The optically transmissive substrate 20 is made of materials which canwithstand subsequent processing temperatures. The optically transmissivesubstrate 20 may be, for example, a 4 inch quartz wafer 500 micronsthick. Such quartz wafers are widely available from, for example, HoyaCorporation U.S.A at 960 Rincon Circle, San Jose, Calif. 95131.

As seen in FIG. 2A, a light blocking layer (e.g., a 50 nm thick tungstenlayer) is deposited and patterned to form the light-blocking aperturelayer 22. The aperture layer 22 is made out of an opaque material (e.g.,tungsten) which remains stable during subsequent fabrication steps. Thetungsten may be deposited using, for example, well-known sputteringtechniques. A pattern of photoresist is formed over the aperture layer22 using well-known photolithographic processes. Aperture layer 22 isthen etched using a Drytek 100 plasma etcher. A mixture of 50% by volumeSF₆ and 50% by volume C₂ClF₅ is introduced into the reaction chamber ofthe etcher at a rate of 300 sccm (150 sccm for HF₆ and 150 sccm forC₂ClF₅). Etching occurs at a pressure of approximately 100 mTorr withthe power setting on the etcher at 500 watts until the opticallytransmissive substrate 20 is exposed (approximately one minute). Afteretching, the remaining photoresist is removed using a conventionaloxygen plasma strip. Patterning described hereinafter may be similarlyperformed.

As seen in FIG. 2B, an optically transmissive protective layer 24 (e.g.,an approximately 94 nm thick 7%-by-weight phosphorus-doped silicondioxide) is next deposited as a passivation layer. The reflectivedeflectable element (mirror 48) is to be connected to opticallytransmissive substrate 20 through protective layer 24. The silicondioxide protective layer 24 may be deposited, for example, by LPCVDprocesses in the quartz tube of a Tylan furnace at approximately 400° C.and 250 mTorr for approximately 5 minutes. SiH₄, O₂, and PH₃ areintroduced into the chamber at rates of 28, 115, and 7 sccm,respectively. The phosphorous-doped silicon dioxide is then reflowed at1100° C. for 20 minutes in a steam environment.

A sacrificial layer 26 (e.g., an approximately 0.6 μm thick amorphoussilicon layer), which will eventually be removed as describedhereinafter, is deposited on the protective layer 24. The amorphoussilicon layer may be deposited using LPCVD processes in, for example,the quartz tube of a Tylan furnace. The SLM 10 is exposed in the quartztube at approximately 670° C. and 200 mTorr for 135 minutes. Acomposition of SiH₄ and H₂ is introduced into the quartz tube at a flowrate of 246 sccm (146 sccm for SiH₄ and 100 sccm for H₂).

Holes 25 are patterned through sacrificial amorphous silicon layer 26 byselective anisotropic etching by using, for example, patterned plasmaetching in a 50% SF₆ and 50% C₂ClF₅ (by volume) environment until aportion of protective layer 24 is exposed through sacrificial layer 26.Such etching may occur in the reaction chamber of a Drytek 100 plasmaetcher. The gas composition is introduced at a rate of 100 sccm (50 sccmfor SF₆ and 50 sccm for C₂ClF₂), and a pressure of 150 mTorr. Typically,it takes approximately 4.5 minutes to expose the portion of protectivelayer 24 through sacrificial layer 26 under these conditions.

A mirror structural support layer 28, for example an approximately 138nm thick low-stress silicon nitride layer, is deposited and patterned toform mirror 48 and motion stop 49. Mirror 48 is a substantially rigidplate. The low stress silicon nitride layer may be deposited, forexample, in a quartz tube of a Tylan furnace by using LPCVD processes atapproximately 785° C. and 250 mTorr for approximately 36 minutes.Deposition occurs, for example, by introducing SiCl₂H₂ and NH₃ into thequartz tube at 165 sccm and 32 sccm, respectively. After deposition andpatterned light exposure of photoresist, the silicon nitride may beetched using an AMT 8100 hexagonal-electrode plasma etcher powered at1200 watts. The etch gases, for example, O₂ and CHF₃, are introducedinto the reaction chamber at respective flow rates of 6 sccm and 85sccm, respectively, with an etch period of 17 minutes. Under theseconditions, the polysilicon to silicon nitride selectivity ratio isapproximately 1:6.

As seen in FIG. 2C, a hinge layer 30 (e.g., an approximately 40 nm thicklayer of low-stress silicon nitride) is then grown and patterned toadditionally define the torsion hinge 50 (a top view of this pattern canbe seen in FIG. 8A). At least a portion of hinge 50 contacts protectivelayer 24 through holes 25 to define supports 51 (FIGS. 2D-2F). The hinge50 operates by “torsion” which means that the hinge 50 is twisted byapplying torque about the longitudinal direction of the hinge 50. Thus,the end of hinge 50 attached to the mirror 48 is angularly deflectedwith respect to the ends supported by supports 51 and 51. Hinge 50 maybe, for example, approximately 0.5 microns wide.

The thin layer of low stress silicon nitride for the hinge layer 30 isdeposited in a quartz tube of a Tylan furnace using an LPCVD process.SiCl₂H₂ and NH₃ are introduced into the quartz tube at a flow rate of,for example, 165 sccm and 32 sccm, respectively. The deposition occurs,for example, at a temperature of 785° C. and at a pressure of 250 mTorrfor 11 minutes.

As shown in FIG. 2D, the sacrificial layer 26 is then partially removedusing an isotropic etch process. The etch process is isotropic so thatportions of the sacrificial layer 26 are removed from underneath themirror 48 and hinge 50. After the partial etch of sacrificial layer 26,the sacrificial layer 26 that is not underneath mirror 48 and hinge 50is removed. On the other hand, significant portions of the sacrificiallayer 26 underneath mirror 48 and hinge 50 remain due to the protectionof mirror 48 and hinge 50. Therefore, after the partial etch,sacrificial layer 26 continues to support mirror 48 and hinge 50 andprevents airborne particulates from lodging underneath mirror 48 andhinge 50 during further fabrication steps described hereinafter. Onesuitable isotropic etch process is by exposure to a plasma etchingprocess in the reaction chamber of a Drytek 100 plasma etcher.Approximately 100% SF₆ is introduced into the reaction chamber at a flowrate of approximately 50 sccm with the power setting on the etcher setat 375 watts. Etching occurs for approximately 100 seconds at roomtemperature (however, the plasma generates heat), and a pressure ofapproximately 150 mTorr. In this process, the selectivity ratio ofsilicon to silicon nitride is approximately 6:1.

Referring to FIG. 2E, horizontal surfaces (e.g., mirror structuralsupport layer 28, hinge layer 30, and portions of protective layer 24)of the SLM 10 are then coated with a conductive and reflective layer 32(e.g., approximately 30 nm thick layer of aluminum) which is opticallyreflective. Some vertical surfaces (e.g., the vertical surface of hinge50 proximate the mirror 48) are also coated to electrically connect thereflective layer 32 on the mirror structural support layer 28 with thereflective layer 32 on the protective layer 24. For clarity, theportions of reflective layer 32 on hinge layer 30 and the verticalsurfaces are not shown in FIG. 2E. Such a reflective layer 32 may bedeposited by, for example, evaporating aluminum downwardly at an anglesuch that the horizontal vector of the angle is from mirror 48 to motionstop 49. With this angle, no metal (aluminum) exists on protective layer24 at the point where motion stop 49 contacts protective layer 24because motion stop 49 shields this surface from metal deposition. Notethat the protective layer 24 is exposed due to the partial etching ofsacrificial layer 26 described above. The evaporation may occur, forexample, in the reaction chamber of an e-gun thermal evaporator at adeposition rate of one nanometer per second.

Spacers 44 (FIGS. 1 and 13) are provided on the optically transmissivesubstrate. Spacers 44 are, for example, composed of Hoechst-DelaneseAZ4330-RS photoresist, spun on at 5000 rpm for 30 seconds, exposed andpatterned to form spacers 44 using conventional photolithographictechniques, then hard baked at 233° C. for 1 hour to give increasedstructural rigidity.

The mirrors 48 a, 48 b and 48 c are fully released from opticallytransmissive substrate 20, except at hinge supports 51 and 51, with asecond isotropic etch, for example, a xenon diflouride etch process,which completely removes the sacrificial layer 26. This etching isperformed at approximately 4 Torr in an approximately 100% xenondiflouride environment for approximately 20 minutes at room temperature.Under these conditions the selectivity of this etching process is over ahundred to one.

The optically transmissive substrate 20 with the mirror array attachedthereto is now ready to bond to a circuit substrate 34 (e.g., asemiconductor substrate) containing addressing circuitry 36, as shown incross section in FIG. 3A. Spacers 44 (FIGS. 1 and 13) are bonded to thecircuit substrate 34 to hold optically transmissive substrate 20 apartfrom, but in close proximity to, circuit substrate 34.

In one embodiment, planar optical elements such as two dielectric layers70 and 72 (FIG. 2F) having a different index of refraction are depositedas mirror structural support layer 28. This stack of dielectric layersmay reflect light or filter out specific frequency ranges. For example,a layer of silicon dioxide (optical index of 1.46) deposited on top of alayer of silicon nitride (with an optical index of 2.0) will enhance thereflectivity of, for example, aluminum reflective layer 32 with areflectivity of 92% to 95% over much of the optical spectrum if thesilicon nitride layer is 68 nm thick and the silicon dioxide layer is 96nm thick.

After sacrificial layer 26 is fully etched away, optically transmissivesubstrate 20 is bonded to the circuit substrate 34. First, thesubstrates 20 and 34 are optically aligned and held together, and can beglued together with epoxy dispensed around the edge of circuit substrate34. Since the top substrate 20 is optically transmissive, alignment canbe accomplished easily by aligning a pattern on the opticallytransmissive substrate 20 to a pattern on the circuitry substrate 34. Bydispensing epoxy around the edges of optically transmissive substrate 20and circuit substrate 34 in a clean environment, the mirror 48 may beisolated from airborne particulates.

In FIG. 3A, a bottom electrode 42 (e.g., a 500 nm thick aluminum bottomelectrode) of cell 12 is shown connecting to addressing circuitry 36through contact 43. Many configurations are possible. In one embodiment,the active bottom electrode 42 should be physically located higher thanthe rest of the circuit components 36 and interconnects. In thisembodiment, the bottom electrode 42 interacts with the overhangingmirror 48 through electrostatic forces.

The operation of the above-described embodiment is shown in FIG. 3A andFIG. 3B. In FIG. 3A, the mirror 48 is undeflected. In this unbiasedstate, an incoming light beam, from a light source 64, obliquelyincident to SLM 10 passes through the optically transmissive substrate20 and is reflected by the flat mirrors 48 and partially reflected byaperture layer 22. The angle of the outgoing light beam 58 is thus alsooblique to the optically transmissive substrate 20. The outgoing lightbeam may be received by, for example, an optical dump 78. Theincorporation of the aperture layer 22 into the optically transmissivesubstrate 20 is a technique to eliminate unwanted light scattering fromthe underlying hinge 50.

Cell 12 with a voltage bias applied between the mirror 48 and the bottomelectrode 42 applied is shown in FIG. 3B. The mirror 48 is deflected dueto electrostatic attraction. Because of the design of the hinge 50, thefree end of the mirror 48 is deflected towards the circuit substrate 34.Note that hinge 50 may be more flexible than mirror 48 such that theapplication of force causes substantially all of the bending to be inhinge 50. This may be accompished by making hinge layer 30 much thinnerthan mirror structural support layer 28 as described above. Thedeflection of the mirror 48 deflects the outgoing light beam 58, by asignificant angle, into the imaging optics 66.

The motion of mirror 48 is limited by motion stop 49 contacting theprotective layer 24 deposited on optically transmissive substrate 20(see FIG. 3B) so that mirror 48 does not contact the circuit substrate34. Since contact does not occur, the electrically connected mirrors 48,48 a, 48 b and 48 c remain at the same potential. Also, there is nocharge injection and welding between the mirror 48 and the electrode 42which can result in sticking. When mirror 48, in the undeflectedposition, is separated from optically tranmissive substrate 20 by, forexample, 2.8 microns, the motion stop 49 may extend (for example,approximately 3.3 microns) from the pivot axis of hinge 50.

The full electromechanical characteristics of the modulator are furtherelucidated in FIG. 4 and FIG. 5. In FIG. 4, deflection angle α of themirror 48 is plotted against the voltage bias and hysteresis isobserved. As a voltage bias is applied between mirror 48 and electrode42 (FIGS. 3A and 3B), the mirror 48 deflects (see line 401 of FIG. 4).When the mirror 48 deflects past the snapping voltage V_(snap) (e.g.,approximately 6.8 volts), the restoring mechanical force of the hinges50 can no longer balance the electrostatic force and the mirror 48 snapstoward the electrode 42 of the circuit substrate 34 (see line 402 ofFIG. 4) until motion stop 49 contacts optically transmissive substrate20. The voltage must be lowered substantially below the snapping voltage(see line 403 of FIG. 4) to V_(release) (e.g., approximately 5.6 volts)in order for the mirror 48 to return towards its undeflected position(see line 404 of FIG. 4). Thus, the mirror 48 would be anelectromechanically bistable device between voltages V_(release) andV_(snap). In other words, given a specific voltage between V_(release)and V_(snap) there are two possible deflection angles α of mirror 48depending on the history of mirror 48 deflection. Therefore, mirror 48deflection acts as a latch. These bistability and latching propertiesexist since the mechanical force required for deflection is roughlylinear with respect to deflection angle α, whereas the opposingelectrostatic force is inversely proportional to the distance betweenmirror 48 and electrode 42.

This latching action allows driver circuitry to be placed off-chip oronly at the periphery using passive addressing instead of having amemory cell for driving each electrode. For example, each electrode 42in each given row may be electrically connected while each mirror 48 ineach given column is electrically connected. During addressing, for eachpixel cell not in the same row or column as the addressed pixel cell,the applied voltage bias is at an intermediate voltage (e.g., 6.2 volts)between V_(release) and V_(snap). Thus, for these pixel cells, thedeflection of mirror 48 represents a one binary state (e.g., a binaryone) if the mirror 48 is deflected at line 403 and the other binarystate (e.g., a binary zero) if the mirror is deflected at line 401. Inother words, this intermediate voltage does not uniquely determine thestate of mirror 48 deflection.

If an on state (or an off state) is to be programmed at the addressedpixel cell, the electrode 42 voltage of the addressed pixel cell row isaltered to increase (or decrease to turn off) the applied bias voltage.The mirror 48 voltage of the addressed pixel cell column is also alteredto increase (or decrease to turn off) the applied bias voltage. Forunaddressed pixel cells that happen to be in the same row or column asthe addressed pixel cell, the applied bias voltage increases (ordecreases to turn off), but is still between V_(release) and V_(snap).Therefore, the binary states do not change for the unaddressed pixelcells that are in the same row and column as the addressed pixel cell.However, for the addressed pixel cell, both the electrode 42 and mirror48 voltages have been altered to increase (or decrease to turn off) theapplied bias voltage. This increase is greater than V_(snap) (or thedecrease is less than V_(release) to turn off the addressed pixel) andthus the addressed pixel cell is on (or off). In order to address andprogram, only one driver circuit for each row and column is needed.Therefore, the driver circuits may be placed along the periphery of thedevice or off chip.

Even for fully active addressing in which each electrode 42 has adriving circuit (such as a transistor in a DRAM configuration),connecting mirrors in groups could increase addressing efficiency. Thismay be accomplished either with connections at the periphery of themirror array, or by depositing pillars connecting the mirrors to thecircuit substrate at pixel locations. Since the electrostatic forcedepends only on the total voltage between conductive and reflectivelayer 32 and bottom electrode 42, a negative voltage applied to a mirrorgroup (via reflective layer 32) reduces the operating voltage of thecorresponding electrodes thus reducing the voltage requirement of SLM10. It is desirable, for example, to keep the operating voltage below 5Vbecause 5V switching capability is standard to the semiconductorindustry. In addition, the amount of charge needed to bias eachelectrode of the addressed pixel is smaller than an embodiment in whichall mirrors are held at ground. Thus the time required to program theaddressed pixel cell is relatively fast.

In FIG. 5, we plot mechanical and electrical torques vs. deflectionangle α as the applied voltage bias is increased and the mirror 48tilts. As shown in FIG. 5, the mechanical torque τ_(mechanical) causedby the mechanical restoring force of the hinge 50 is roughly linearrelative to the deflection angle α. On the other hand, each electricaltorque (τ_(electrical)) curve caused by the electrostatic force betweenthe mirror 48 and electrode 42 obeys an inverse square law and risessharply with increasing deflection angle α (as the capacitance of themirror 48—electrode 42 structure is increased). At low voltage biases,as exemplified by bottom curve (V=V_(a)), there is an equilibrium pointα_(E). If the mirror 48 is slightly more (or less) tilted than theequilibrium point α_(E), the upward directed mechanical force (or thedownward directed electrostatic force) dominates and the mirror 48deflects back up (or down) to the equilibrium point α_(E). By changingthe on-state voltage bias between the mirror 48 and electrode 42, thetilt of the mirror 48 is controlled.

If the voltage bias between mirror 48 and electrode 42 exceeds acritical value (here V=V_(b) as seen in the middle curve), theequilibrium point α_(E) no longer exists and the mirror 48 snaps towardthe circuit substrate 34 (see line 402 of FIG. 4). Snapping occurs whenthe mirror 48 is approximately half-way deflected towards the circuitsubstrate 34 if the mechanical torque is linear in angle. If noalternate stopping mechanisms were in place, the snapping action wouldcontinue until mirror 48 makes contact with electrode 42. It may bedesirable to avoid this mode of operation because sticking might occurdue to welding. Welding is particularly likely when the surfaces makingcontact are originally at different electrical potentials, or when largecontact surface areas are in play as occur with malleable materials suchas metal.

The motion stops 49 described above are made of hard materials such assilicon nitride. These hard materials have potentially longer lifetimesthan metal structures. Motion stops 49 also have a limited contact areawith the optically transmissive substrate 20 and therefore reducesticking forces. By keeping the motion stops 49 at the same potential asthe reflective layer 32 with which they come into contact, electricalpotential differences that lead to welding can also be avoided. Snappingand thus physical contact between motion stops 49 and opticallytransmissive substrate 20 can be avoided entirely by keeping V<V_(b).

If the SLM 10 is operated at voltages past the snapping point, it can beoperated in a digital manner using either active addressing (i.e., aseparate transistor drives electrode 42 at each pixel location), orusing passive addressing (i.e., only one driver circuit for each row orcolumn), by exploiting the electromechanical bistability mentionedearlier. If SLM 10 operates at voltages greater than V_(snap),deflection along line 403 may represent one binary state while all otherdeflections represent the other binary state.

If the SLM 10 is operated at voltages below the snapping point, it canbe operated in an analog fashion using active addressing. For example,for different deflection angles α, a different intensity of light may bereflected to imaging optics 66 if light source 64 emits rays from a widerange of locations. The use of high quality mechanical materialsdescribed above results in good uniformity over the pixel array, andmakes analog operation practical. The mirror 48 deflection will then beproportional to the charge stored at each corresponding electrode.Operation below the snapping point also has the advantage of preventingmechanical contact during operation, eliminating possible stickingproblems.

For mirror operation past the snapping voltage, it is further possibleto vary the addressing voltage as a function of time as follows. Duringthe active addressing stage, the addressing is set to the level requiredfor electrostatic-force-based mirror deflection for those electrodeswhere mirror deflection is required. After the mirrors in question havedeflected, the voltage required to hold in the deflected position isless than that required for the actual deflection. This is because thegap between the deflected mirror and the addressing electrode is alreadysmaller than when the mirror is in the process of being deflected.Therefore, in the stage after the active addressing stage, (called the“hold stage”, for example), the addressing voltage level could bereduced from its original level without substantially affecting thestate of the mirrors. One advantage of having a hold stage voltage isthat the undeflected mirrors are now also subject to a smallerelectrostatic attractive force than before, and they therefore attain aposition closer to the zero-deflected position. This improves theoptical contrast ratio between the deflected mirrors and the undeflectedmirrors.

An electrical schematic of a memory array portion of addressingcircuitry 36 is shown in FIG. 6A and FIG. 6B. If active addressing isemployed, an addressing scheme embodied in the circuitry of FIG. 6A canbe used to address each pixel cell of the SLM 10 individually.Substrates 20 and 34 are not shown in FIG. 6A, and the mirror 48 andbottom electrode 42 are drawn symbolically. The scheme is identical tothat used for a DRAM (dynamic random access memory). Each pixel cell 12,12 a, 12 b and 12 c is driven by a respective NMOS transistor 68, 68 a,68 b and 68 c. For example, if pixel cell 12 is to be addressed,electrode 42 is charged as follows. The state of the correspondingcolumn of pixels (containing pixel cells 12 and 12 c) is set by holdingthe corresponding bit line 62 at the appropriate bias voltage for thedesired mirror deflection. The bias is relative to the mirrors 48, whichare connected to a common voltage such as ground. The corresponding wordline 60 is then pulsed low-high-low (i.e., NMOS transistor 68 istemporarily opened) and the voltage value is stored as charge betweenthe bottom electrode 42 and mirror 48. An additional capacitor may beplaced electrically in parallel to the mirror-electrode combination toinsure that enough charge is stored to overcome leakage.

Another embodiment uses an SRAM (static random access memory) type cellto drive the actuating electrodes (FIG. 6B). For example, pixel cell 12is addressed by applying a voltage representing a binary one on thecorresponding bit line 62. The voltage is sufficient to charge electrode42 and deflect mirror 48. A voltage representing a binary zero ispresent on the other corresponding bit line 62 (bar). The correspondingword line 60 is selected by asserting a voltage sufficient to opentransistors 69 a and 69 b. The input to inverter 69 c and the outputfrom inverter 69 d represent a binary zero. The output from inverter 69c and the input to inverter 69 d represents a binary one. Withtransistor 69 a open, electrode 42 is charged through bit line 62.

Since the mirror 48 area may be relatively large on semiconductor scales(12×12 microns=144 square microns), more complex circuitry can bemanufactured beneath each actuating electrode. Possible circuitryincludes, but is not limited to, storage buffers to store timesequential pixel information at each pixel; and electronic circuitry tocompensate for possible non-uniformity of mirror/electrode separation bydriving the electrodes at varying voltage levels.

With the appropriate choice of dimensions (substrate 20 and 34separation of 1 to 5 μm and hinge thickness of 0.03 to 0.3 μm) andmaterials (silicon nitride), an SLM 10 can be made to have an operatingvoltage of only a few volts. The angular torsion modulus of hinge 50 maybe, for example, approximately 3.3×10⁻¹⁴ Newton meters per degree ofrotation. As discussed above, the voltage at which the addressingcircuitry must operate can be made even lower by maintaining the mirror48 potential negative (or positive), as referenced to the circuit ground(the bias voltage). For example, in the negative bias case, this has theeffect of shifting the hysteresis curve of FIG. 4 to the left, so thatthe actuating electrode array can operate in a low voltage range such as0-5V and cause mirror deflection. This results in a larger difference indeflection angle for a given voltage. The maximum negative bias voltageis −V_(release). The negative voltage may be asserted to mirror 48 by,for example, closing switch 76 coupling the mirror 48 to a voltagesource 74 configured to assert a negative voltage (see pixel cell 12 ofFIG. 6A).

Depending on the planarity and resistance to bending of the twosubstrates 20 and 34, spacers 44 may need to be embedded in the mirrorarray itself. FIG. 7 shows a top view of a reasonably contiguous mirrorarray having a spacer 44 in the middle. The mirror array includes 56mirrors 48, 48 a to 48 z, 48 aa to 48 az, 48 ba, 48 bb and 48 bc. Forclarity, optically transmissive substrate 20 and circuit substrate 34are not shown and each mirror 48 is represented as a square. Spacer 44is centered among mirrors 48 aa, 48 ab, 48 ai and 48 aj, each mirrorhaving an edge coplanar with a corresponding edge of spacer 44 as shownin FIG. 7.

FIG. 8A shows a top plan view of pixel cells 12 and 12 a of the SLM 10created by the process described with reference to FIGS. 2A-2D. Themirrors 48 and 48 a rotate around the axis defined by the thin hinges 50and 50 a. Mirror 48 and 48 a motion is limited by the motion stops 49and 49 a, which move towards and eventually hit the opticallytransmissive substrate 20 to which the mirrors 48 and 48 a are attached(see FIG. 3B). In one embodiment, the diagonal lines represent the areawhich includes a relatively thick silicon nitride layer as compared tothe thinner hinges. This reinforcement mechanically stiffens mirrors 48and 48 a while retaining flexibility in hinges 50 and 50 a. Similarreinforcement is seen in FIGS. 8B-8E.

There exist many possible variations in the design of the mirror 48 thatconstitute the optically active component of the SLM 10. FIGS. 8A-8Dshow variations in which motion stop 49 and mirror 48 are substantiallycoplanar. One embodiment has two motion stops 49 _(8B) is shown in FIG.8B. In FIG. 8C, hinges 50 _(8C) are connected directly to motion stops49 _(8C). The embodiments of FIGS. 8C and 8D are similar except thatFIG. 8D shows only one motion stop 49 _(8D). FIG. 8E shows supports 51_(8E) that are adjacent. Pixel cell 12 _(8E) of FIG. 8E has no motionstops at all and is most useful if SLM 10 operates only at belowV_(snap).

In the embodiments shown in FIGS. 8F and 8G, the hinges 50 _(8F) and 50_(8G) operate by flexure and not by torsion. “Flexure” means that theends of hinges 50 _(8F) and 50 _(8G) are fixed and that angulardeflection of mirrors 48 _(8F) and 48 _(8G) causes hinge 50 _(8F) and 50_(8G) to deflect angularly at a middle portion of hinges 50 _(8F) and 50_(8G), thereby causing hinges 50 _(8F) and 50 _(8G) to stretch along thelongitudinal direction of hinges 50 _(8F) and 50 _(8G). The hinges 50_(8F) and 50 _(8G) of FIG. 8F and FIG. 8G have hinge supports 51 _(8F)and 51 _(8G) which tie hinges 50 _(8F) and 50 _(8G) down to opticallytransmissive substrate 20 (FIGS. 1, 2A, 2B, 2C, 2D, 2E, 2F, 3A, 3B, 9A,9B, 9C, 9D, 10A, 10B, 10C, 11A, 11B, 11C, 12 and 13). Thus hinges 50_(8F) and 50 _(8G) bend longitudinally and not torsionally. In thisembodiment of hinges 50 _(8F) and 50 _(8G), the mechanical restoringforce will increase with faster-than-linear dependence on deflection, asthe strain in primarily tensile. A hinge 50 _(8F) or 50 _(8G) with thischaracteristic might be useful when the mirror 48 is operated in ananalog manner, since the snapping angle (and thus V_(snap)) will beincreased. In FIG. 8H, the hinge 50 _(8H) is a cantilever design, alsooperating by flexion and not by torsion.

A second fabrication process to produce the micro-mechanical SLM 10 ofthis invention is illustrated in cross-section in FIGS. 9A-9D and FIG.10A. This process uses multiple silicon nitride layers to achieve amirror-type structure with a higher aperture ratio (fraction ofoptically active area) than is possible with the process outlined inFIGS. 2A-2F. This is partly because the mirror stop 49 _(10A) (FIG. 10A)and mirror 48 _(10A) (FIG. 10A) lie in different planes. Opticallytransmissive substrate 20 is made of materials such as quartz which canwithstand subsequent processing temperatures. In this process, thedeposition of the light-blocking aperture layer 22 and protective layer24, shown in FIGS. 1, 2A, 2B and 2C, has been skipped but could be addedas the first step of the process.

Sacrificial layer 26 _(10A) (e.g., an approximately 0.5 micron thick,LPCVD-grown amorphous silicon layer) is deposited. After holes 25 _(10A)are patterned through to optically transmissive substrate 20 as seen inFIG. 9A, a motion stop layer (e.g., a 150 nm thick LPCVD-grownlow-stress silicon nitride layer) is deposited and patterned to form themotion stop 49 _(10A) having a sharp contact tip 90.

Next, a hinge layer (e.g., a 40 nm thick layer of low-stress siliconnitride) is grown and then patterned to define the torsion hinges 50_(10A) as seen in FIG. 9B. A second sacrificial layer 27 is deposited(e.g., an approximately 0.5 micron thick, LPCVD-grown amorphous siliconlayer), and patterned so that a hole 25 c reaches down to the hinge 50_(10A) (FIG. 9C). This second sacrificial layer 27 _(10A) could bepolished with commonly known chemical mechanical polishing (CMP)techniques to achieve a flat surface for subsequent film depositions.Since subsequently deposited layers include the mirror structuralsupport layer 28 _(10A), the mirror structural support layer 28 _(10A)will feature enhanced flatness thus improved reflective uniformity andimproved system contrast and brightness. Finally, an approximately 138nm thick silicon nitride mirror structural support layer 28 _(10A) isdeposited and patterned to form the substantially rigid mirror plate(FIG. 9D).

Next, sacrificial layers 26 _(10A) and 27 are partially removed using anisotropic (e.g., a xenon diflouride gas etch; the 100% SF₆ plasmaprocess refered to earlier may also be used) etch process, and theentire structure is coated with, for example, a very thin layer (30 nm)of aluminum (reflective layer 32 _(10A) of FIG. 10A) which is bothhighly reflective and serves to electrically connect the mirrorstogether as described above.

Finally the mirrors are fully released with a second isotropic etchprocess (for example, a xenon diflouride gas etch), completely removingthe sacrificial layer 26 _(10A). The mirrors are now ready to be joinedwith the circuit substrate 34 containing addressing circuitry, using,for example, the same techniques described earlier in reference to FIG.2 and FIG. 3. Thus a sub-hinge structure is fabricated in which a hinge50 _(10A), which may be transparent, is disposed between the opticallytransmissive substrate 20 and the mirror 48.

FIGS. 10A-10C show embodiments of the sub-hinge structure fabricatedusing the process above. For clarity, SLM's 10 _(10A-10D) are rotated 90degrees so that hinges 50 _(10A-10D) may be seen. FIG. 10A shows a cell12 _(10A) with a torsion hinge 50 _(10A) and one motion stop 49 _(10A)centrally located. This device is shown to scale in an array ofsimilarly structure cells in FIG. 14. FIG. 10B shows an embodiment withtwo motion stops 49 _(10B). FIG. 10C shows a device that uses tworibbon-type hinges 49 _(10C), which also inherently provide the “motionstop” functionality in two ways. As mirror 48 _(10C) deflects, hinges 50_(10C), which may be straight in the undeflected position, take on an Sshape due to torque applied by mirror 48 _(10C). As the angulardeflection of mirror 48 _(10C) increases, the hinges 50 _(10C) stretch,as well as bend. Thus, the mechanical restoring force for mirror 48_(10C) increases at greater than a linear rate with reference to angulardeflection. This non-linear quality is one way by which hinges 50 _(10C)function provide “motion stop” funcitionality even without contactingthe optically transmissive substrate 20. A second way that “motion stop”functionality is achieved with this structure is by contact between themirror 48 _(10C) and hinges 50 _(10C).

FIG. 10D shows yet another embodiment of a torsion hinge device, forwhich the step of depositing the motion stop layer can be eliminated,since it does not make use of separately fabricated motion stops. In theembodiment of FIG. 10D, contacts 51 _(10D) are formed through holes in afirst sacrificial layer. A ribbon hinge 50 _(10D) is formed on the firstsacrificial layer. A second sacrificial layer is formed over the hinge50 _(10D) and the first sacrificial layer and formed with a hole whichexposes a central portion of hinge 50 _(10D). Contact 51 a is formedthrough the hole and a single layer forming mirror 48 _(10D) and motionstop 49 _(10D) is deposited on top of the second sacrificial layer. Thetwo sacrificial layers are then removed to free mirror 48 _(10D) andmotion stop 49 _(10D).

A third fabrication process to produce the micro-mechanical spatiallight modulator (SLM) of this invention is illustrated in cross-sectionin FIGS. 11A-11C and FIG. 12. This process also uses multiple siliconnitride layers to achieve a mirror-type structure with a higher apertureratio (fraction of optically active area) than is possible with theprocess outlined in FIG. 2. Optically transmissive substrate 20 is madeof a material such as quartz which can withstand subsequent processingtemperatures. In this process, the deposition of the light-blockingaperture layer 22, protective layer 24 has been omitted from theprocess, but could be added as the first step in the process.

First, the optically transmissive substrate 20 is patterned and etchedso that small bumps 111 are formed as contact points, as seen in FIG.11A. Next, a 0.5 μm thick LPCVD-grown amorphous silicon sacrificiallayer 26 ₁₂ is deposited, which will eventually be removed. This isfollowed by the deposition of a 138 nm thick silicon nitride mirrorstructural support layer 28 ₁₂, which is patterned to form thesubstantially rigid mirror plate 28 ₁₂ (FIG. 11B). Next, a secondsacrificial layer 27 ₁₂ is deposited, and patterned so that hole 29 _(β)reaches down to the mirror plate 28, and so that holes 29 ₁₂ reach downto bumps 111. An approximately 40 nm thick low-stress silicon nitridehinge layer 29 ₁₂ is then grown and patterned to define the torsionhinges as seen in FIG. 11C.

Next, the sacrificial layers 26 ₁₂ and 27 ₁₂ are partially removed usinga xenon diflouride isotropic etch process having an etch selectivity ofover 100 to 1 (a 100% SF₆ plasma process may also be used), and theentire structure is coated with a very thin layer (30 nm) of aluminumwhich is both highly reflective and serves to electrically connect themirrors together. Finally the mirrors are fully released with a secondxenon diflouride etch process, completely removing the sacrificial layer26 ₁₂. The mirrors are now ready to be joined with a semiconductorsubstrate containing addressing circuitry, using the same substratebonding techniques described earlier in reference to FIG. 2 and FIG. 3.

FIG. 12 shows an embodiment of the structure fabricated using theprocess above. Supports 51 ₁₂ are formed by the silicon nitride hingelayer deposition through holes 29 ₁₂. Hinge 50 ₁₂ is formed of hingelayer 29 ₁₂. Mirror 48 ₁₂ is the mirror plate 28 ₁₂ shown in FIG. 11B.This mirror is attached to hinge 50 ₁₂ via support 51 _(β). The mirror48 ₁₂ is separated from optically transmissive substrate 20 in theundeflected position due to supports 51 ₁₂.

A single square mirror is not the only possible reflective deflectableelement 48 possible; other designs, such as a cloverleaf or grating-likedesign are possible. For example, a row of skinny mirrors all deflectingin unison can form a switchable diffraction grating. It is also feasiblethat the reflective deflectable element is a metal-coated membrane. Thedeflectable element design could also be made so that one part of theelement moves away from the lower substrate instead of towards it.Mirror elements can also be designed to deflect in more than onedirection, i.e. have more than one controllable degree of freedom.

If the modulator is operated so that the reflective deflectable elementtouches the circuit substrate when actuated, such as would occur for thedevice embodiment shown in FIG. 8E, additional structure may be added tothe circuit substrate. For example, in a mirror device, protruding bumpscan be fabricated to reduce the total surface area actually in contact.The bumps are preferably at the same electrical potential as the mirrorto avoid welding on contact. Additionally, a conducting transparentlayer, such as indium tin oxide, can be deposited before the protectivelayer 24. A bias applied between the conducting transparent layer andthe mirrors will actively pull the mirrors to the top substrate 20 andreset them to their off state.

There are many different methods to make electrical circuitry thatperforms the addressing function. The DRAM, SRAM, and passive addressingschemes described above, as well as latch devices commonly known to theart, may all perform the addressing function. The circuit substrate maybe transparent, for example, quartz. In this case, transistors may bemade from polysilicon, as compared to crystalline silicon.

In one embodiment, the aperture layer 22 may be further modified tocomprise any binary optical pattern. In addition, other planar opticalcomponents can be integrated into the optically transmissive substrate20, at either the top surface 16 or bottom surface 14 of opticallytransmissive substrate 20. Some of the many possible structures includecolor filters composed of one or a stack of layers, micro-lenses, andcolor-dispersive or diffractive features. See for example Jahns andHuang, “Planar Integration of Free-Space Optical components” AppliedOptics, vol. 28, No. 9, 1 May 1989. The ability to integrate thisoptical functionality into the optically transmissive substrate canincrease achievable contrast ratio and lowers cost by reducing the costof free-space optics at the system level. In many embodiments of thisinvention, the mirror plates themselves can incorporate opticalfunctionality beyond simple reflectivity. For example, the mirrors canbe comprised of multiple substantially transparent layers to addfiltering capability or to enhance reflectivity of certain wavelengthsas compared to others. This is useful, for example, as a means tobalance color deficiencies of the optical system, such as the spectrumof an illuminating lamp.

There are many fabrication process modifications which can be made.Instead of using an epoxy to bond the two substrates together, othermaterials, such as metals that melt at attainable process temperatures,or thermoplastics can be used. In any scheme, the spacers which hold thesubstrates apart can be built on either substrate. It is important tonote that the method of deflection is also not necessarily restricted toelectrostatic: thermal and piezo-electric actuation are among alternatepossibilities. There can also be a top to bottom substrate electricalconnection at each pixel, where elements that make up each pixel can beheld at their own electrical potential. Chemical-mechanical polishing(CMP) can be added at several stages during the fabrication process, forexample after the protective layer has been deposited on top of thepatterned aperture layer, or after the mirror layer has been deposited,in order to make the optically active area of the mirror as flat aspossible.

Many material substitutions are possible for the micro-mechanicalelements: one possibility is the use of another type of ceramic (e.g.silicon dioxide) for the mirror, or even making the mirror completelyout of a metal (e.g. an aluminum alloy). There are also manypossibilities for the sacrificial layer material, such as silicondioxide. Silicon could also be used instead of tungsten as the gridmaterial. This would make the process more compatible with siliconnitride deposition facilities that are used for CMOS chip production.The grid and associated protective layer may also be left out entirely.Yet another combination of materials would be silicon (e.g., LPCVDpolycrystalline silicon) for the deflectable elements (e.g. mirrors),and silicon dioxide (e.g., LPCVD grown) for the sacrificial layer. Thesilicon dioxide may be etched away with hydrofluoric acid, and dryingmay be accomplished using well-known critical-point-drying techniques tofacilitate stiction-free mirror release. The spacers can also be madefrom a wide variety of materials, including various polymers, oxides, ormetals.

In summary, the SLM 10 of this invention is a device that exhibits manydesirable properties, including high resolution, high opticalefficiency, high contrast ratio or modulation depth, and high mechanicalreliability. The SLM 10 has application in a wide variety of areas,including projection display systems. Low switching voltages and theinnovative design of the SLM 10 enable standard CMOS circuitry to beused as the addressing mechanism. The deflectable elements themselvescan also be manufactured using standard processes available in siliconCMOS fabrication facilities, on a separate substrate. Both substratescan be fabricated using relatively gross features and less thanstate-of-the-art facilities. These factors make the SLM 10 easy andinexpensive to manufacture.

Although the present invention has been described above in terms ofspecific embodiments, it is anticipated that alterations andmodifications thereof will no doubt become apparent to those skilled inthe art. It is therefore intended that the following claims beinterpreted as covering all such alterations and modifications as fallwithin the true spirit and scope of the invention.

1. A spatial light modulator device, comprising: an array of deflectablereflective elements held on a first substrate for reflecting an incidentlight so as to produce an image, wherein the adjacent elements in thearray have a distance of 0.5 micron or less.
 2. The device of claim 1,further comprising a second substrate; and a gap between the first andsecond substrate, wherein the deflectable elements are enclosed in thegap.
 3. The device of claim 2, further comprising an array of electrodesand circuitry disposed proximate to the deflectable reflective elementsfor electrostatically actuating the deflectable reflective elements. 4.The device of claim 3, wherein the first substrate is lighttransmissive; and the second substrate is a semiconductor substratehaving thereon the array of electrodes and circuitry.
 5. The device ofclaim 2, wherein the first and second substrate are bonded together. 6.The device of claim 1, wherein deflectable elements aremicroelectromechanical deflectable elements.
 7. The device of claim 5,wherein the distance between the first and second substrates is from 1to 5 microns.
 8. The device of claim 1, wherein the first substratefurther comprises: a dielectric layer.
 9. The device of claim 5, whereinthe substrates are bonded together with the spacer therebetween using anadhesive.
 10. The device of claim 9, wherein the adhesive is epoxy. 11.The device of claim 5, wherein the substrates are aligned together suchthat each deflectable element is aligned with an electrode.
 12. Thedevice of claim 9, wherein the spacer is positioned outside theplurality of deflectable elements.
 13. The device of claim 6, whereinthe deflectable elements are mirror plates.
 14. The device of claim 13,where in the deflectable element comprises a ceramic material.
 15. Thedevice of claim 14, wherein the ceramic material is silicon dioxide orsilicon nitride.
 16. The device of claim 13, wherein the deflectableelement comprises a light reflection layer.
 17. The device of claim 16,wherein each mirror plate is attached to a hinge such that the mirrorplate is operable to rotate.
 18. The device of claim 17, wherein thehinge is a torsion hinge.
 19. The device of claim 18, wherein the mirrorplate comprise a first and second portions such that during the rotationof the mirror plate, the second portion moves towards the glasssubstrate and the first portion moves away from the glass substrate; andwherein the hinge and the mirror plate are positioned in differentplanes.
 20. A projector, comprising: a light source providing anillumination light; a spatial light modulator of claim 1 for modulatingthe illumination light; and a display target on which the modulatedlight is projected so as to produce a desired image.
 21. A method ofmodulating an illumination light so as to produce a desired image, themethod comprising: providing an array of reflective micromirrors held ona first substrate such that the micromirrors are operable to switch byrotation between an ON state and an OFF state; associating eachmicromirror with an electrode such that an electrostatic field can beestablished between the micromirror and the electrode associatedtherewith; directing the illumination light onto the micromirrors;applying a voltage to the micromirrors such that all micromirrors arehave the same electrical potential; and deflecting the micromirrorsbetween the ON and OFF state by varying the electrostatic fields betweenthe micromirrors and the electrodes.
 22. The method of claim 21, whereinthe step of deflecting the micromirrors further comprises: deflectingthe micromirror to the ON state so as to reflect the illumination lightonto a display target; and deflecting the micromirror to the OFF stateso as to reflect the illumination light away from the display target.23. The method of claim 21, wherein each micromirror is attached to ahinge such that the micromirror is operable to rotate.
 24. The method ofclaim 23, wherein the hinge is a torsion hinge.
 25. The method of claim24, wherein the step of directing the illumination light onto themicromirror further comprises: directing the illumination light onto areflecting surface of the micromirror.
 26. The method of claim 25,wherein the reflecting surface comprises an aluminum layer.
 27. Aspatial light modulator device, comprising: an array of deflectablereflective elements held on but not directly connected to a siliconsubstrate having an array of electrodes and circuitry for deflecting thedeflectable elements.
 28. The device of claim 27, wherein thedeflectable elements are connected to the silicon substrate via a lighttransmissive substrate and a spacer that is disposed between the siliconsubstrate and the light transmissive substrate.
 29. The device of claim28, wherein the two substrates are bonded together, forming a gap inwhich the deflectable elements are enclosed.
 30. The device of claim 28,wherein the two substrates are bonded with epoxy.
 31. The device ofclaim 27, wherein the micromirror is attached to a hinge such that themicromirror is operable to rotate relative to the silicon substrate. 32.A spatial light modulator device, comprising: an array of deflectablereflective micromirrors fabricated on a light transmissive substrate; anarray of electrode associated with the deflectable elements fordeflecting the elements, wherein each deflectable element is associatedwith and deflected by one electrode; and wherein each micromirror isattached to a hinge that is in the same plane of the micromirror at anon-deflected state such that the micromirror is operable to rotaterelative to the light transmissive substrate.
 33. The device of claim32, wherein the hinge is a torsion hinge.
 34. The device of claim 32,wherein electrodes are on a silicon substrate that is coupled with thelight transmissive substrate.
 35. The device of claim 34, wherein thelight transmissive substrate and the silicon substrate are bondedtogether, leaving a gap therebetween, in which gap the deflectableelements are enclosed.
 36. The device of claim 34, wherein the eachmicromirror is operable to be switched between an ON and OFF state inoperation.
 37. A spatial light modulator device, comprising: an array ofdeflectable reflective micromirrors held on a substrate, wherein eachmicromirror is attached to a deformable hinge that is disposed in aseparate plane of the micromirror such the micromirror is operable to berotated to an ON state and an OFF state, wherein the OFF state is astate where the micromirror is parallel to the substrate.
 38. The deviceof claim 37, wherein the hinge is a torsion hinge.
 39. The device ofclaim 38, wherein the hinge is disposed between the micromirror and asubstrate on which the micromirror is connected to.
 40. The device ofclaim 37, further comprising: an array of electrodes and circuitrydisposed proximate to the deflectable micromirrors for deflecting themicromirrors.
 41. The device of claim 40, wherein the substrate on whichthe micromirrors are held is a light transmissive substrate.
 42. Thedevice of claim 41, wherein the electrodes and circuitry are formed on asilicon substrate bonded to the light transmissive substrate.
 43. Thedevice of claim 42, wherein the two substrates are bonded with epoxy.44. A method of modulating an illumination light so as to produce adesired image, the method comprising: providing a deflectable reflectivemicromirror array having a set of array edges, wherein each micromirroris operable to be rotated to an ON and OFF state; directing theillumination light to the micromirrors along a direction whoseprojection on the micromirror array is perpendicular to the edge of themicromirror array; individually deflecting the micromirrors of themicromirror array to the ON state and the OFF state; and projecting thereflected illumination light from the micromirror at the ON state to adisplay target; and the reflected illumination light form themicromirror at the OFF state away from the display target.
 45. Themethod of claim 44, wherein the step of individually deflecting themicromirrors further comprises: associating the micromirror to anelectrode; and establishing an electrostatic field between themicromirror and the electrode associated thereto.
 46. The method ofclaim 45, further comprising: maintaining the micromirrors of themicromirror array at one electrical potential.
 47. A method of making amicromirror device, comprising: fabricating a reflective deflectablemicromirror on a light transmissive substrate; bonding the lighttransmissive substrate to a silicon substrate having thereon anelectrode and circuitry; and wherein the light transmissive substrate ismaintained after bonding.
 48. A spatial light modulator device,comprising: an array of deflectable reflective micromirrors, each ofwhich is attached to a deformable hinge; an array of electrodes andcircuitry on a silicon substrate disposed proximate to the micromirrorsfor deflecting the micromirrors, wherein each micromirror is associatedwith and deflected by one electrode; and wherein the hinge is disposedbetween the micromirror and the electrode associated therewith.
 49. Thedevice of claim 48, wherein the micromirrors are formed on a lighttransmissive substrate.
 50. A spatial light modulator device,comprising: a substrate that is transmissive to visible light; a siliconsubstrate, wherein the silicon substrate and the substrate that istransmissive to visible light are bonded together with a spacertherebetween forming a gap between the substrates; a plurality ofdeflectable elements enclosed within the gap; and a light blocking filmdisposed on a selected area of the light transmissive substrate.
 51. Thedevice of claim 50, wherein the light blocking film is disposed aroundthe parameter of the light transmissive substrate.
 52. A method ofmaking a micromirror device, the method comprising: depositing one ormore sacrificial layers that are amorphous silicon layers on asubstrate; forming a hinge and a micromirror on the depositedsacrificial layers such that after removal of the sacrificial layers,the micromirror is attached to the hinge; and removing the sacrificiallayers using a vapor phase etchant comprising xenon difluoride.
 53. Themethod of claim 52, wherein the etchant comprises a diluent gascomprising an inert gas.